본문
Specification
220 x 220 Stack Type Specification
| Item | Specification | |
| X-axis (Low-axis) | Y-axis (Upper-axis) | |
| Moving Traver | 220 mm | 220 mm |
| Resolution | ≤ 0.005 ㎛ / count | ≤ 0.005 ㎛ / count |
| Mean Position Accuracy | ±2 ㎛ (With Compensation) | ±2 ㎛ (With Compensation) |
| Bi-directional Repeatability | ±1 ㎛ | ±1 ㎛ |
| Flatness / Straightness | 20 ㎛ / 20 ㎛ | 30 ㎛ / 25 ㎛ |
| Pitch / Yaw | 25 arc-sec / 20 arc-sec | 20 arc-sec / 20 arc-sec |
| Maximum Velocity | 500 mm/s | 500 mm/s |
| Maximum Acceleration | 0.1 G | 0.1 G |
| Velocity Ripple | - | - |
| Orthogonality | X to Y : ≤ ±5 ㎛ / 500 mm (Datum : Square Master) | |
400 x 400 Stack Type Specification
| Item | Specification | |
| X-axis (Low-axis) | Y-axis (Upper-axis) | |
| Moving Traver | 400 mm | 400 mm |
| Resolution | ≤ 0.1 ㎛ / count | ≤ 0.1 ㎛ / count |
| Mean Position Accuracy | ±2 ㎛ (With Compensation) | ±2 ㎛ (With Compensation) |
| Bi-directional Repeatability | ±1 ㎛ | ±1 ㎛ |
| Flatness / Straightness | ±5 ㎛ / ±5 ㎛ | ±5 ㎛ / ±5 ㎛ |
| Pitch / Yaw | ±5 arc-sec / ±5 arc-sec | ±5 arc-sec / ±5 arc-sec |
| Maximum Velocity | 500 mm/s | 500 mm/s |
| Maximum Acceleration | 0.4 G | 0.4 G |
| Velocity Ripple | - | - |
| Orthogonality | X to Y : ≤ ±5 ㎛ / 500 mm (Datum : Square Master) | |
2,280 x 920 Stack Type Specification
| Item | Specification | |
| X-axis (Low-axis) | Y-axis (Upper-axis) | |
| Moving Traver | 2,280 mm | 920 mm |
| Resolution | ≤ 0.005 ㎛ / count | ≤ 0.005 ㎛ / count |
| Mean Position Accuracy | ±3 ㎛ (With Compensation) | ±3 ㎛ (With Compensation) |
| Bi-directional Repeatability | ±1 ㎛ | ±1 ㎛ |
| Flatness / Straightness | ±7.5 ㎛ / ±7.5 ㎛ | ±10 ㎛ / ±10 ㎛ |
| Pitch / Yaw | ±7.5 arc-sec / ±7.5 arc-sec | ±10 arc-sec / ±10 arc-sec |
| Maximum Velocity | 900 mm/s | 900 mm/s |
| Maximum Acceleration | 0.3 G | 0.3 G |
| Velocity Ripple | ±0.3 % @ 200 mm/s | ±0.3 % @ 200 mm/s |
| Orthogonality | X to Y : ≤ ±5 ㎛ / 500 mm (Datum : Square Master) | |
88" Stack Type Specification
| Item | Specification | |
| X-axis (Low-axis) | Y-axis (Upper-axis) | |
| Moving Traver | 6,800 mm | 100 mm |
| Resolution | ≤ 1 ㎛ / count | ≤ 1 ㎛ / count |
| Mean Position Accuracy | - | - |
| Bi-directional Repeatability | - | - |
| Flatness / Straightness | 150 ㎛ / 100 ㎛ | 50 ㎛ / 50 ㎛ |
| Pitch / Yaw | - | - |
| Maximum Velocity | 1,000 mm/s | 1,200 mm/s |
| Maximum Acceleration | 0.15 G | 0.15 G |
| Velocity Ripple | - | - |
| Orthogonality | X to Y : ≤ ±5 ㎛ / 500 mm (Datum : Square Master) | |
