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Specification
820x1,170 Split Type Specification
| Item | Specification | |
| X-axis (Low-axis) | Y-axis (Upper-axis) | |
| Moving Traver | 820 mm | 1,170 mm |
| Resolution | ≤ 0.005 ㎛ / count | ≤ 0.005 ㎛ / count |
| Mean Position Accuracy | ±1 ㎛ (With Compensation) | ±1 ㎛ (With Compensation) |
| Bi-directional Repeatability | ±0.5 ㎛ | ±0.5 ㎛ |
| Flatness / Straightness | 10 ㎛ / 10 ㎛ | 10 ㎛ / 10 ㎛ |
| Pitch / Yaw | 10 arc-sec / 10 arc-sec | 10 arc-sec / 10 arc-sec |
| Maximum Velocity | 1,000 mm/s | 1,000 mm/s |
| Maximum Acceleration | 1.5 G | 1.5 G |
| Velocity Ripple | - | - |
| Orthogonality | X to Y : ≤ ±5 ㎛ / 500 mm (Datum : Square Master) | |
6G Half Split Type Specification (Encap)
| Item | Specification | |
| X-axis (Low-axis) | Y-axis (Upper-axis) | |
| Moving Traver | 2,354 mm | 2,200 mm |
| Resolution | ≤ 0.005 ㎛ / count | ≤ 0.005 ㎛ / count |
| Mean Position Accuracy | ±3 ㎛ (With Compensation) | ±3 ㎛ (With Compensation) |
| Bi-directional Repeatability | ±2 ㎛ | ±2 ㎛ |
| Flatness / Straightness | ±10 ㎛ / ±5 ㎛ | ±10 ㎛ / ±5 ㎛ |
| Pitch / Yaw | ±10 arc-sec / ±5 arc-sec | ±10 arc-sec / ±5 arc-sec |
| Maximum Velocity | 800 mm/s | 800 mm/s |
| Maximum Acceleration | 0.2 G | 0.2 G |
| Velocity Ripple | ±0.1 % @ 400 mm/s | - |
| Orthogonality | X to Y : ≤ ±5 ㎛ / 500 mm (Datum : Square Master) | |
49" Split Type Specification (Frame Docking Type)
| Item | Specification | |
| X-axis (Low-axis) | Y-axis (Upper-axis) | |
| Moving Traver | 2,340 mm + 3,690 mm | 1,910 mm |
| Resolution | ≤ 1 ㎛ / count | ≤ 1 ㎛ / count |
| Mean Position Accuracy | - | - |
| Bi-directional Repeatability | - | - |
| Flatness / Straightness | 50㎛ / 50㎛ | 20㎛ / 20㎛ |
| Pitch / Yaw | - | - |
| Maximum Velocity | 1,500 mm/s | 1,200 mm/s |
| Maximum Acceleration | 0.2 G | 0.4 G |
| Velocity Ripple | ±0.5 % @ 500 mm/s | - |
| Orthogonality | X to Y : ≤ ±5 ㎛ / 500 mm (Datum : Square Master) | |
88" Split Type Specification (Frame Docking Type)
| Item | Specification | |
| X-axis (Low-axis) | Y-axis (Upper-axis) | |
| Moving Traver | 6,600 mm | 2,700mm |
| Resolution | ≤ 0.05 ㎛ / count | ≤ 0.05 ㎛ / count |
| Mean Position Accuracy | - | - |
| Bi-directional Repeatability | - | - |
| Flatness / Straightness | 50 ㎛ / 50 ㎛ | 50 ㎛ / 50 ㎛ |
| Pitch / Yaw | - | - |
| Maximum Velocity | 1,000 mm/s | 1,200 mm/s |
| Maximum Acceleration | 0.2 G | 0.4 G |
| Velocity Ripple | - | - |
| Orthogonality | X to Y : ≤ ±5 ㎛ / 500 mm (Datum : Square Master) | |
