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Specification
6G Gantry Type Specification
| Item | Specification | |
| X1 & X2-axis (Gantry-axis) | Y-axis (Cross-axis) | |
| Moving Traver | 2,100 mm | 1,610 mm |
| Resolution | ≤ 0.005 ㎛ / count | ≤ 0.005 ㎛ / count |
| Mean Position Accuracy | ±2 ㎛ (With Compensation) | ±2 ㎛ (With Compensation) |
| Bi-directional Repeatability | ±1 ㎛ | ±1 ㎛ |
| Flatness / Straightness | 30 ㎛ / 20 ㎛ | 30 ㎛ / 25 ㎛ |
| Pitch / Yaw | 20 arc-sec / 20 arc-sec | 20 arc-sec / 20 arc-sec |
| Maximum Velocity | 1,600 mm/s | 1,600 mm/s |
| Maximum Acceleration | 0.3 G | 0.3 G |
| Velocity Ripple | - | - |
| Orthogonality | X to Y : ≤ ±5 ㎛ / 500 mm (Datum : Square Master) | |
8G Gantry Type Specification
| Item | Specification | |
| X1 & X2-axis (Gantry-axis) | Y-axis (Cross-axis) | |
| Moving Traver | 2,915 mm | 2,480 mm |
| Resolution | ≤ 0.005 ㎛ / count | ≤ 0.005 ㎛ / count |
| Mean Position Accuracy | ±2 ㎛ (With Compensation) | ±2 ㎛ (With Compensation) |
| Bi-directional Repeatability | ±1 ㎛ | ±1 ㎛ |
| Flatness / Straightness | 30㎛ / 20㎛ | 30㎛ / 25㎛ |
| Pitch / Yaw | 20 arc-sec / 20 arc-sec | 25 arc-sec / 25 arc-sec |
| Maximum Velocity | 1,600 mm/s | 1,600 mm/s |
| Maximum Acceleration | 0.3 G | 0.3 G |
| Velocity Ripple | - | - |
| Orthogonality | X to Y : ≤ ±5 ㎛ / 500 mm (Datum : Square Master) | |
65" Gantry Type Specification
| Item | Specification | |
| X1 & X2-axis (Gantry-axis) | Y-axis (Cross-axis) | |
| Moving Traver | 1,150 mm | 1,600 mm |
| Resolution | ≤ 0.005 ㎛ / count | ≤ 0.005 ㎛ / count |
| Mean Position Accuracy | ±2 ㎛ (With Compensation) | ±2 ㎛ (With Compensation) |
| Bi-directional Repeatability | ±1 ㎛ | ±1 ㎛ |
| Flatness / Straightness | 30㎛ / 20㎛ | 30㎛ / 25㎛ |
| Pitch / Yaw | 20 arc-sec / 20 arc-sec | 25 arc-sec / 20 arc-sec |
| Maximum Velocity | 800 mm/s | 800 mm/s |
| Maximum Acceleration | 0.1 G | 0.1 G |
| Velocity Ripple | - | - |
| Orthogonality | X to Y : ≤ ±5 ㎛ / 500 mm (Datum : Square Master) | |
75" Gantry Type Specification
| Item | Specification | ||
| X1 & X2-axis (Gantry-axis) | Y-axis (Cross-axis) | Table X-axis | |
| Moving Traver | 1,500 mm | 2,150 mm | 900 mm |
| Resolution | ≤ 0.005 ㎛ / count | ≤ 0.005 ㎛ / count | ≤ 1 ㎛ / count |
| Mean Position Accuracy | ±2 ㎛ (With Compensation) | ±2 ㎛ (With Compensation) | ±100 ㎛ (With Compensation) |
| Bi-directional Repeatability | ±1 ㎛ | ±1 ㎛ | ±100 ㎛ |
| Flatness / Straightness | 30㎛ / 20㎛ | 30 ㎛ / 25 ㎛ | - |
| Pitch / Yaw | 20 arc-sec / 20 arc-sec | 25 arc-sec / 20 arc-sec | - |
| Maximum Velocity | 1,000 mm/s | 1,000 mm/s | 300 mm/s |
| Maximum Acceleration | 0.2 G | 0.2 G | 0.1 G |
| Velocity Ripple | - | - | - |
| Orthogonality | X to Y : ≤ ±5 ㎛ / 500 mm (Datum : Square Master) | ||
85" Gantry Type Specification
| Item | Specification | |
| X1 & X2-axis (Gantry-axis) | Y-axis (Cross-axis) | |
| Moving Traver | 2,100 mm | 2,300 mm |
| Resolution | ≤ 0.005 ㎛ / count | ≤ 0.005 ㎛ / count |
| Mean Position Accuracy | ±2 ㎛ (With Compensation) | ±2 ㎛ (With Compensation) |
| Bi-directional Repeatability | ±1 ㎛ | ±1 ㎛ |
| Flatness / Straightness | 30㎛ / 20㎛ | 30㎛ / 25㎛ |
| Pitch / Yaw | 20 arc-sec / 20 arc-sec | 25 arc-sec / 20 arc-sec |
| Maximum Velocity | 1,000 mm/s | 1,000 mm/s |
| Maximum Acceleration | 0.2 G | 0.2 G |
| Velocity Ripple | - | - |
| Orthogonality | X to Y : ≤ ±5 ㎛ / 500 mm (Datum : Square Master) | |
115" Gantry Type Specification
| Item | Specification | |
| X1 & X2-axis (Gantry-axis) | Y-axis (Cross-axis) | |
| Moving Traver | 2,900 mm | 1,900 mm |
| Resolution | ≤ 0.005 ㎛ / count | ≤ 0.005 ㎛ / count |
| Mean Position Accuracy | ±2 ㎛ (With Compensation) | ±2 ㎛ (With Compensation) |
| Bi-directional Repeatability | ±1 ㎛ | ±1 ㎛ |
| Flatness / Straightness | 25㎛ / 20㎛ | 25㎛ / 25㎛ |
| Pitch / Yaw | 20 arc-sec / 20 arc-sec | 25 arc-sec / 20 arc-sec |
| Maximum Velocity | 800 mm/s | 800 mm/s |
| Maximum Acceleration | 0.1 G | 0.2 G |
| Velocity Ripple | - | - |
| Orthogonality | X to Y : ≤ ±5 ㎛ / 500 mm (Datum : Square Master) | |
